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Chinese Beyond 20kHz: Innovations in High-Frequency MEMS Microphone Technology
The growing demand for ultrasonic signal detection (>20kHz) in industrial non-destructive testing, biomedical imaging, and consumer electronics requires MEMS microphones to balance high-frequency response with signal fidelity. Traditional silicon condenser microphones struggle with trade-offs between resonant frequency and sensitivity. SISTC addresses this challenge through corrugated silicon membranes embedded with silicon carbide (SiC), unlocking new possibilities for next-gen acoustic sensing.
1. Technical Principle: Synergistic Optimization via Corrugated Geometry & Material Heterogeneity
This study validates performance enhancements using COMSOL multiphysics simulations:
- Corrugated Silicon Membrane: 3D axisymmetric modeling shows stress homogenization, reducing fracture risks.
- SiC Embedding Technology:
- Frequency Extension: SiC’s high elastic modulus (450GPa) boosts resonance from 26kHz to 70kHz (vs. 63kHz for flat Si membranes).
- Sensitivity Trade-off: Sensitivity decreases only from -76dB to -79dB, outperforming commercial ultrasonic sensors (typically -82dB).
- Tunability: Adjusting embedded material height (0.1μm simulation steps) customizes frequency-sensitivity balance.
Fig. 1: Corrugated Silicon Membrane with SiC Embedding (Example: COMSOL Stress Distribution)
2. SISTC’s Advantages & Product Implementation
Leveraging this research, SISTC delivers high-frequency MEMS microphone solutions with:
✅ Broadband Coverage (20Hz–70kHz): Supports ultrasonic detection and high-fidelity audio recording.
✅ Industrial Durability: Corrugated anti-fatigue design passes 100k mechanical vibration cycles.
✅ Customization: Compatible with SiC, aluminum nitride (AlN), and other heteromaterials for specialized frequency responses.
Explore SISTC’s High-Frequency MEMS Microphones → Product Details
3. Applications & Market Potential
- Industrial NDT: Ultrasonic flaw detectors achieve 0.1mm crack detection accuracy.
- Medical Imaging: Portable ultrasound devices reach 500μm resolution.
- Smart Homes: Enables pet ultrasonic command interaction (20–45kHz).
The ultrasonic sensor market is projected to hit $6.3 billion by 2027 (MarketsandMarkets Report), growing at 8.2% CAGR. SISTC collaborates with global medical device leaders to commercialize this technology.
Why Choose SISTC?
- Multidisciplinary Simulation: COMSOL/ANSYS integration cuts R&D cycles by 50%.
- Wafer-Level Bonding: Zero interface bubbles between SiC and silicon, yield >99%.
- Full-Spectrum Certification: Complies with IEC 61000-4 EMC standards.
Download High-Frequency MEMS Whitepaper → SISTC Resource Center
Conclusion
High-frequency MEMS microphones are redefining acoustic sensing limits. SISTC combines material innovation and structural optimization to deliver end-to-end solutions from simulation to mass production. For custom designs or samples, contact our engineering team!
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