High Dynamic Range MEMS Microphone Using Electrostatic Feedback Control

ntroduction

With the rapid evolution of voice-first interfaces, smart wearables, and edge-AI audio systems, the demand for high-performance, low-power digital microphones is growing. One major technical challenge is achieving a wide dynamic range (DR) while maintaining minimal power consumption and a compact form factor.

At Wuxi Silicon Source Technology Co., Ltd. (SiSTC), we continue to explore cutting-edge technologies like Electrostatic Force Feedback Control (EFFC) to push the boundaries of CMOS-MEMS microphone performance.

Overview of EFFC-Based MEMS Microphone Architecture

The proposed microphone architecture integrates a novel Electrostatic Force Feedback Control (EFFC) system that dynamically adjusts the biasing of the MEMS sensor based on input amplitude. This approach enables:

  • 📈 Adaptive mechanical gain, acting before the analog front end (AFE)
  • 🔧 Relaxed noise requirements for readout electronics
  • Lower power consumption with high signal integrity

By applying electrostatic feedback force in real-time, the system modulates sensitivity depending on input SPL (Sound Pressure Level), effectively extending the acoustic dynamic range without sacrificing low-end sensitivity or high-end overload handling.

Key Technical Features

Capacitive Feedback Instrumentation Amplifier (CFB IA)

Traditional resistive-feedback amplifiers (RFB IAs) contribute significant thermal noise. This design replaces them with a capacitive-feedback IA featuring:

  • Adjustable gain
  • Enhanced low-noise performance
  • Better linearity across SPL spectrum

Sub-Sampling Amplitude Detector (SSAD)

To detect real-time acoustic energy efficiently, a low-power SSAD is implemented using:

  • Cascaded low-order decimation filters
  • Real-time acoustic volume estimation
  • High-resolution SPL tracking

Predictive Reference Charge Pump (PRCP)

The PRCP module fine-tunes the MEMS bias voltage with high accuracy using:

  • Closed-loop control architecture
  • Prediction logic to shorten settling time
  • Fast response to dynamic input changes

Measured Performance

ParameterValue
Signal-to-Noise Ratio (SNR)68.2 dB @ 94 dB SPL
Acoustic Overload Point (AOP)133 dB SPL
Acoustic Dynamic Range (DR)107.2 dB
Power Consumption430 μA @ 3.072 MHz clock

This level of performance makes the proposed system ideal for applications requiring both whisper-level sensitivity and shout-level overload tolerance.

Applications and Market Relevance

EFFC-based MEMS microphones are well-suited for:

  • 🎧 Smart earbuds and wearables
  • 🚘 Automotive voice control and in-cabin sensing
  • 🧠 Edge AI and far-field voice assistants
  • 🎙️ Professional audio & noise-canceling systems

🔍 Explore SiSTC’s MEMS microphone lineup for high-SNR and low-power audio sensing:
👉 https://sistc.com/product-category/mems-microphone/

Conclusion

The integration of electrostatic force feedback, sub-sampling amplitude detection, and predictive charge control in a CMOS-MEMS microphone represents a breakthrough in dynamic-range-aware audio sensing. SiSTC is actively investing in these frontier technologies to enable the next generation of adaptive, high-resolution voice interfaces.

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