{"id":15534,"date":"2025-09-23T07:22:41","date_gmt":"2025-09-23T07:22:41","guid":{"rendered":"https:\/\/sistc.com\/?p=15534"},"modified":"2025-09-23T07:22:58","modified_gmt":"2025-09-23T07:22:58","slug":"blog-mems-microphone-mft-staircase-cavity","status":"publish","type":"post","link":"https:\/\/sistc.com\/zh\/blog-mems-microphone-mft-staircase-cavity\/","title":{"rendered":"\u5229\u7528\u591a\u819c\u539a\u63a9\u6a21\u5236\u9020\u57fa\u4e8e MEMS \u7684\u5e26\u9636\u68af\u8f6e\u5ed3\u8154\u4f53\u7684\u7535\u5bb9\u5f0f\u7845\u9ea6\u514b\u98ce"},"content":{"rendered":"<p><strong>\u65e0\u9521\u7845\u6e90\u79d1\u6280\u6709\u9650\u516c\u53f8\uff08SISTC\uff09<\/strong> \u63a8\u51fa\u4e86\u4e00\u79cd\u7a81\u7834\u6027\u7684 <strong>MEMS MIC<\/strong> \u8bbe\u8ba1\uff0c\u5229\u7528 <strong>\u591a\u819c\u539a\u5ea6\uff08MFT\uff09\u5149\u523b\u5de5\u827a<\/strong> \u6784\u5efa\u4e86\u4e00\u79cd\u65b0\u578b\u9636 <strong>\u68af\u5f62\u8f6e\u5ed3\u7a7a\u8154\uff08S-CTC\uff09<\/strong> \u7ed3\u6784\u3002\u8fd9\u4e00\u521b\u65b0\u6709\u671b\u663e\u8457\u63d0\u9ad8\u4e0b\u4e00\u4ee3\u9ea6\u514b\u98ce\u7684\u4fe1\u566a\u6bd4\uff08SNR\uff09\u548c\u7075\u654f\u5ea6\u3002<\/p><h3 class=\"wp-block-heading\">\u80cc\u666f\uff1aMEMS \u9ea6\u514b\u98ce\u7684\u7ed3\u6784\u4e3a\u4f55\u91cd\u8981<\/h3><p>MEMS \u9ea6\u514b\u98ce\uff0c\u7279\u522b\u662f <strong>\u7845\u7535\u5bb9\u5f0f\u9ea6\u514b\u98ce<\/strong>\u5728\u667a\u80fd\u624b\u673a\u3001\u7269\u8054\u7f51\u8bbe\u5907\u548c\u533b\u7597\u5e94\u7528\u4e2d\uff0c\u58f0\u5b66\u4f20\u611f\u5668\u5df2\u6210\u4e3a\u4e00\u4e2a\u5173\u952e\u90e8\u4ef6\u3002\u76ee\u524d\u7684\u8bbe\u8ba1\u4f9d\u8d56\u4e8e\u4f20\u7edf\u7684\u76d2\u5f0f\u7a7a\u8154\uff08BC\uff09\u7ed3\u6784\uff0c\u5728\u8fd9\u79cd\u7ed3\u6784\u4e2d\uff0c\u53ea\u6709\u7ea6 2\/3 \u7684\u819c\u7247\u80fd\u6709\u6548\u5730\u4f20\u611f\u58f0\u97f3\uff0c\u4ece\u800c\u9650\u5236\u4e86\u7535\u5bb9\u548c\u4fe1\u566a\u6bd4\u6027\u80fd\u3002<\/p><p>\u514b\u670d\u8fd9\u4e00\u5c40\u9650\u6027\u7684\u5c1d\u8bd5\u5305\u62ec <strong>\u7070\u9636\u5149\u523b\uff08GSL\uff09<\/strong>\uff0c\u53ef\u4ee5\u5236\u9020\u5149\u6ed1\u7684\u4e09\u7ef4\u7a7a\u8154\u7ed3\u6784\u3002\u7136\u800c\uff0c\u7531\u4e8e\u8d85\u7cbe\u7ec6\u5149\u7f69\u7684\u8981\u6c42\uff0cGSL \u7684\u6210\u672c\u4ecd\u7136\u5f88\u9ad8 (<a href=\"https:\/\/spie.org\/news\/gray-scale-lithography\" target=\"_blank\" rel=\"noreferrer noopener\"><mark style=\"background-color:rgba(0, 0, 0, 0)\" class=\"has-inline-color has-ast-global-color-0-color\">SPIE - \u7528\u4e8e\u4e09\u7ef4\u5fae\u7ec6\u52a0\u5de5\u7684\u7070\u5ea6\u5149\u523b\u6280\u672f<\/mark><\/a>).<\/p><figure class=\"wp-block-image aligncenter size-full is-resized\"><img fetchpriority=\"high\" decoding=\"async\" width=\"1328\" height=\"289\" src=\"https:\/\/sistc.com\/wp-content\/uploads\/2025\/09\/Graphical-abstract-full-size-image.jpg\" alt=\"\" class=\"wp-image-15536\" style=\"width:776px;height:auto\" srcset=\"https:\/\/sistc.com\/wp-content\/uploads\/2025\/09\/Graphical-abstract-full-size-image.jpg 1328w, https:\/\/sistc.com\/wp-content\/uploads\/2025\/09\/Graphical-abstract-full-size-image-300x65.jpg 300w, https:\/\/sistc.com\/wp-content\/uploads\/2025\/09\/Graphical-abstract-full-size-image-1024x223.jpg 1024w, https:\/\/sistc.com\/wp-content\/uploads\/2025\/09\/Graphical-abstract-full-size-image-768x167.jpg 768w, https:\/\/sistc.com\/wp-content\/uploads\/2025\/09\/Graphical-abstract-full-size-image-18x4.jpg 18w, https:\/\/sistc.com\/wp-content\/uploads\/2025\/09\/Graphical-abstract-full-size-image-600x131.jpg 600w\" sizes=\"(max-width: 1328px) 100vw, 1328px\" \/><figcaption class=\"wp-element-caption\">\u56fe\u5f62\u6458\u8981\u5168\u5c3a\u5bf8\u56fe\u50cf<\/figcaption><\/figure><h3 class=\"wp-block-heading\">MFT \u5149\u523b\u6280\u672f\u7684\u7a81\u7834<\/h3><p>SISTC\u7684 <strong>\u591a\u819c\u539a\u5ea6\uff08MFT\uff09\u63a9\u819c<\/strong> \u53d6\u4ee3\u4e86\u591a\u4e2a\u8680\u523b\u6b65\u9aa4\u3002\u901a\u8fc7\u4f7f\u7528\u4e0d\u540c\u539a\u5ea6\uff080\u30014\u300114 \u548c 114 nm\uff09\u7684\u94ec\u819c\u5c42\uff0c\u4e00\u6b21\u5149\u523b\u66dd\u5149\u5c31\u80fd\u8fbe\u5230\u6240\u9700\u7684\u6548\u679c\u3002 <strong>3D \u697c\u68af\u7ed3\u6784<\/strong>.<\/p><ul class=\"wp-block-list\"><li><strong>\u5355\u4e00\u8680\u523b\u6b65\u9aa4<\/strong> \u53d6\u4ee3\u6602\u8d35\u7684\u591a\u6b65\u9aa4\u6d41\u7a0b<\/li>\n\n<li>\u5b9e\u73b0\u7535\u5bb9\u589e\u52a0\uff1a\u4ece <strong>2.2 pF \u2192 2.9 pF<\/strong> (~30%\u6539\u8fdb\uff09<\/li>\n\n<li>\u6539\u8fdb <strong>\u4fe1\u566a\u6bd4\u548c\u7075\u654f\u5ea6<\/strong> \u4e0d\u589e\u52a0\u6a21\u5177\u5c3a\u5bf8\u6216\u9694\u819c\u8106\u6027<\/li><\/ul><p>\u8fd9\u6837\u5c31\u53ef\u4ee5 <strong>\u9ad8\u6027\u80fd MEMS \u9ea6\u514b\u98ce<\/strong> \u5176\u6210\u672c\u53ef\u4e0e\u5f53\u4eca\u7684\u5927\u4f17\u5e02\u573a\u8bbe\u8ba1\u76f8\u5ab2\u7f8e\u3002<\/p><p> \u4e86\u89e3\u66f4\u591a\u6709\u5173 SISTC \u7684\u4fe1\u606f <a href=\"https:\/\/sistc.com\/zh\/product-category\/mems-microphone\/\"><mark style=\"background-color:rgba(0, 0, 0, 0)\" class=\"has-inline-color has-ast-global-color-0-color\">MEMS \u9ea6\u514b\u98ce\u4ea7\u54c1\u7cfb\u5217<\/mark><\/a>.<\/p><h3 class=\"wp-block-heading\">\u6027\u80fd\u548c\u5e94\u7528\u524d\u666f<\/h3><p>\u589e\u5f3a\u7684\u7535\u5bb9\u76f4\u63a5\u6709\u52a9\u4e8e <strong>\u66f4\u9ad8\u7684\u4fe1\u566a\u6bd4<\/strong>\u8fd9\u662f\u58f0\u97f3\u6e05\u6670\u5ea6\u7684\u5173\u952e\u56e0\u7d20\u3002\u968f\u7740\u667a\u80fd\u624b\u673a\u8d8a\u6765\u8d8a\u591a\u5730\u96c6\u6210 <strong>\u6bcf\u4e2a\u8bbe\u5907 3-4 \u4e2a\u9ea6\u514b\u98ce<\/strong>\u56e0\u6b64\uff0c\u5bf9\u66f4\u9ad8\u4fe1\u566a\u6bd4\u89e3\u51b3\u65b9\u6848\u7684\u9700\u6c42\u6301\u7eed\u589e\u957f\u3002<\/p><p>\u6b64\u5916\uff0c\u8fd9\u4e00\u8fdb\u7a0b\u8fd8\u4e3a <strong>\u8d85\u4f4e\u538b\u4f20\u611f<\/strong> \u5728\u9ad8\u7ea7\u5e94\u7528\u4e2d\uff0c\u4f8b\u5982<\/p><ul class=\"wp-block-list\"><li><strong>\u667a\u80fd\u624b\u673a\u548c\u7269\u8054\u7f51\u8bed\u97f3\u63a5\u53e3<\/strong><\/li>\n\n<li><strong>\u53ef\u7a7f\u6234\u8bbe\u5907<\/strong> \u8981\u6c42\u59cb\u7ec8\u4f7f\u7528\u9ea6\u514b\u98ce<\/li>\n\n<li><strong>\u533b\u7597\u8bbe\u5907<\/strong>\u5305\u62ec\u9ad8\u7ea7 <strong><a href=\"https:\/\/www.ncbi.nlm.nih.gov\/pmc\/articles\/PMC7302199\/\" target=\"_blank\" rel=\"noreferrer noopener\"><mark style=\"background-color:rgba(0, 0, 0, 0)\" class=\"has-inline-color has-ast-global-color-0-color\">\u7535\u5b50\u542c\u8bca\u5668<\/mark><\/a><\/strong><\/li><\/ul><h3 class=\"wp-block-heading\">\u7ade\u4e89\u4f18\u52bf<\/h3><p>\u4e0e\u4f20\u7edf\u7684 <strong>\u7bb1\u8154\u7535\u5bb9\u5f0f\u9ea6\u514b\u98ce<\/strong>\uff0c <strong>\u68af\u5f62\u8f6e\u5ed3\u7a7a\u8154\uff08S-CTC\uff09<\/strong> \u8fd9\u79cd\u8bbe\u8ba1\u6700\u5927\u9650\u5ea6\u5730\u63d0\u9ad8\u4e86\u819c\u7247\u7684\u8fd0\u52a8\u548c\u7535\u5bb9\uff0c\u4ece\u800c\u5728\u4e0d\u589e\u52a0\u8fc7\u591a\u6210\u672c\u7684\u60c5\u51b5\u4e0b\u5b9e\u73b0\u4e86\u66f4\u597d\u7684\u6027\u80fd\u3002<\/p><p>SISTC\u7684 <strong>MFT \u63a9\u819c\u65b9\u6cd5<\/strong> \u56e0\u6b64\uff0c\u5c06 <strong>\u4f4e\u6210\u672c\u4f18\u52bf<\/strong> \u4e8c\u8fdb\u5236\u5149\u523b\u6280\u672f\u4e0e <strong>3D \u7cbe\u786e\u5ea6<\/strong> \u5148\u8fdb\u7684\u8680\u523b\u5de5\u827a\u3002<\/p><h2 class=\"wp-block-heading\">\u7ed3\u8bba<\/h2><p>SISTC \u7684 <strong>\u57fa\u4e8e MFT \u7684 MEMS \u9ea6\u514b\u98ce\u6280\u672f<\/strong> \u8fd9\u662f <strong>\u9ad8 SNR\u3001\u9ad8\u6210\u672c\u6548\u76ca\u7684\u4f20\u58f0\u5668\u5236\u9020<\/strong>.\u901a\u8fc7\u7ed3\u6784\u521b\u65b0\u4f18\u5316\u7535\u5bb9\uff0cSISTC \u80fd\u591f <strong>\u65b0\u4e00\u4ee3 MEMS MIC \u89e3\u51b3\u65b9\u6848<\/strong> \u7528\u4e8e\u667a\u80fd\u624b\u673a\u3001\u7269\u8054\u7f51\u548c\u533b\u7597\u4fdd\u5065\u3002<\/p><p> \u4e86\u89e3\u66f4\u591a <a href=\"http:\/\/Wuxi Silicon Source Technology (SISTC) has introduced a breakthrough fabrication method for MEMS MIC design, utilizing a Multi-Film Thickness (MFT) lithography process to build a novel staircase contour cavity (S-CTC) structure. This innovation promises significant improvements in signal-to-noise ratio (SNR) and sensitivity for next-generation microphones.  Background: Why Structure Matters in MEMS Microphones  MEMS microphones, especially silicon capacitive microphones, have become a critical component in smartphones, IoT devices, and medical applications. Current designs rely on conventional box cavity (BC) structures, where only ~2\/3 of the diaphragm contributes effectively to sound sensing, limiting capacitance and SNR performance.  Attempts to overcome this limitation have included gray-scale lithography (GSL), which can fabricate smooth 3D cavity structures. However, GSL remains costly due to ultra-fine mask requirements (SPIE \u2013 Grayscale Lithography for 3D Microfabrication ).  The MFT Lithography Breakthrough  The Multi-Film Thickness (MFT) mask developed by SISTC replaces the need for multiple etching steps. By using chromium film layers of different thicknesses (0, 4, 14, and 114 nm), a single photolithography exposure achieves the desired 3D staircase structure.  Single etch step replaces costly multi-step processes  Achieved capacitance increase: from 2.2 pF \u2192 2.9 pF (~30% improvement)  Improved SNR and sensitivity without increasing die size or diaphragm fragility  This allows for high-performance MEMS microphones at a cost competitive with today\u2019s mass-market designs.  \ud83d\udc49 Learn more about SISTC\u2019s MEMS Microphone Product Line .  Performance and Application Outlook  The enhanced capacitance directly contributes to higher SNR, a critical factor for sound clarity. With smartphones increasingly integrating 3\u20134 microphones per device, demand for higher SNR solutions continues to grow.  Moreover, this process opens doors for ultra-low-pressure sensing in advanced applications, such as:  Smartphones &amp; IoT voice interfaces  Wearable devices requiring always-on microphones  Medical equipment, including advanced electronic stethoscopes  Competitive Advantage  Compared to traditional box cavity capacitive microphones, the staircase contour cavity (S-CTC) design maximizes diaphragm movement and capacitance, enabling better performance without excessive costs.  The MFT mask approach thus combines the low-cost advantage of binary lithography with the 3D precision of advanced etching processes.  Conclusion  SISTC\u2019s MFT-based MEMS microphone technology represents a key step forward in high-SNR, cost-efficient microphone fabrication. By optimizing capacitance through structural innovation, SISTC enables next-generation MEMS MIC solutions for smartphones, IoT, and healthcare.  \ud83d\udc49 Learn more about Wuxi Silicon Source Technology (SISTC)  and our ongoing innovations in MEMS MIC and sensor technologies.\"><mark style=\"background-color:rgba(0, 0, 0, 0)\" class=\"has-inline-color has-ast-global-color-0-color\">\u65e0\u9521\u7845\u6e90\u79d1\u6280\u6709\u9650\u516c\u53f8\uff08SISTC\uff09<\/mark><\/a> \u4ee5\u53ca\u6211\u4eec\u5728 <strong>MEMS MIC<\/strong> \u548c\u4f20\u611f\u5668\u6280\u672f\u3002<\/p><p><\/p>","protected":false},"excerpt":{"rendered":"<p>\u65e0\u9521\u7845\u6e90\u79d1\u6280\u6709\u9650\u516c\u53f8\uff08SISTC\uff09\u63a8\u51fa\u4e86\u4e00\u79cd\u7528\u4e8e MEMS MIC \u8bbe\u8ba1\u7684\u7a81\u7834\u6027\u5236\u9020\u65b9\u6cd5\uff0c\u8be5\u65b9\u6cd5\u5229\u7528\u591a\u819c\u539a\uff08MFT\uff09\u5149\u523b\u5de5\u827a\u5236\u9020\u51fa\u4e00\u79cd\u65b0\u9896\u7684\u9636\u68af\u8f6e\u5ed3\u8154\uff08S-CTC\uff09 [...]<\/p>","protected":false},"author":2,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"ast-content-background-meta":{"desktop":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"tablet":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""},"mobile":{"background-color":"var(--ast-global-color-5)","background-image":"","background-repeat":"repeat","background-position":"center center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"_joinchat":[],"footnotes":""},"categories":[42,1],"tags":[],"class_list":["post-15534","post","type-post","status-publish","format-standard","hentry","category-industry-news","category-company-news"],"aioseo_notices":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v24.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>Fabrication of MEMS-Based Capacitive Silicon Microphone with Staircase Contour Cavity Using Multi-Film Thickness Mask - SILICON SOURCE<\/title>\n<meta name=\"description\" content=\"Explore SISTC\u2019s innovative MEMS microphone fabrication using Multi-Film Thickness (MFT) lithography. The staircase contour cavity (S-CTC) boosts capacitance by 30%, improves SNR, and enables high-performance MEMS MIC solutions for smartphones, IoT, and medical devices.\" \/>\n<meta name=\"robots\" content=\"index, follow, max-snippet:-1, max-image-preview:large, max-video-preview:-1\" \/>\n<link rel=\"canonical\" href=\"https:\/\/sistc.com\/zh\/blog-mems-microphone-mft-staircase-cavity\/\" \/>\n<meta property=\"og:locale\" content=\"zh_CN\" \/>\n<meta property=\"og:type\" content=\"article\" \/>\n<meta property=\"og:title\" content=\"Fabrication of MEMS-Based Capacitive Silicon Microphone with Staircase Contour Cavity Using Multi-Film Thickness Mask - SILICON SOURCE\" \/>\n<meta property=\"og:description\" content=\"Explore SISTC\u2019s innovative MEMS microphone fabrication using Multi-Film Thickness (MFT) lithography. 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