{"id":15234,"date":"2025-05-27T13:41:25","date_gmt":"2025-05-27T13:41:25","guid":{"rendered":"https:\/\/sistc.com\/?p=15234"},"modified":"2025-05-27T13:41:27","modified_gmt":"2025-05-27T13:41:27","slug":"research-high-frequency-resonance-sic-embedded-mems-microphones","status":"publish","type":"post","link":"https:\/\/sistc.com\/zh\/research-high-frequency-resonance-sic-embedded-mems-microphones\/","title":{"rendered":"\u9ad8\u9891\u5171\u632f\u7a81\u7834\uff1a\u5d4c\u5165\u78b3\u5316\u7845\u7684\u6ce2\u7eb9\u7845\u819c\u5982\u4f55\u91cd\u65b0\u5b9a\u4e49 MEMS \u9ea6\u514b\u98ce\u6027\u80fd | SISTC\u521b\u65b0\u89e3\u51b3\u65b9\u6848"},"content":{"rendered":"<h3 class=\"wp-block-heading\">\u8d85\u8d8a 20kHz\uff1a\u9ad8\u9891 MEMS \u9ea6\u514b\u98ce\u6280\u672f\u7684\u521b\u65b0<\/h3><p>\u5de5\u4e1a\u65e0\u635f\u68c0\u6d4b\u3001\u751f\u7269\u533b\u5b66\u6210\u50cf\u548c\u6d88\u8d39\u7535\u5b50\u4ea7\u54c1\u5bf9\u8d85\u58f0\u6ce2\u4fe1\u53f7\u68c0\u6d4b\uff08&gt;20kHz\uff09\u7684\u9700\u6c42\u65e5\u76ca\u589e\u957f\uff0c\u8fd9\u5c31\u8981\u6c42 MEMS \u9ea6\u514b\u98ce\u5728\u9ad8\u9891\u54cd\u5e94\u548c\u4fe1\u53f7\u4fdd\u771f\u5ea6\u4e4b\u95f4\u53d6\u5f97\u5e73\u8861\u3002\u4f20\u7edf\u7684\u7845\u7535\u5bb9\u5f0f\u4f20\u58f0\u5668\u5728\u8c10\u632f\u9891\u7387\u548c\u7075\u654f\u5ea6\u4e4b\u95f4\u96be\u4ee5\u53d6\u820d\u3002&nbsp;<strong>SISTC<\/strong>&nbsp;\u901a\u8fc7\u4ee5\u4e0b\u63aa\u65bd\u5e94\u5bf9\u8fd9\u4e00\u6311\u6218&nbsp;<strong>\u5d4c\u5165\u78b3\u5316\u7845\uff08SiC\uff09\u7684\u6ce2\u7eb9\u7845\u819c<\/strong>\u8fd9\u4e3a\u4e0b\u4e00\u4ee3\u58f0\u5b66\u4f20\u611f\u6280\u672f\u5e26\u6765\u4e86\u65b0\u7684\u53ef\u80fd\u6027\u3002<\/p><h4 class=\"wp-block-heading\">1.\u6280\u672f\u539f\u7406\uff1a\u901a\u8fc7\u6ce2\u7eb9\u51e0\u4f55\u5f62\u72b6\u548c\u6750\u6599\u5f02\u8d28\u6027\u8fdb\u884c\u534f\u540c\u4f18\u5316<\/h4><p>\u672c\u7814\u7a76\u5229\u7528 COMSOL \u591a\u7269\u7406\u573a\u4eff\u771f\u9a8c\u8bc1\u4e86\u6027\u80fd\u7684\u63d0\u5347\uff1a<\/p><ol start=\"1\" class=\"wp-block-list\"><li><strong>\u6ce2\u7eb9\u7845\u819c<\/strong>:\u4e09\u7ef4\u8f74\u5bf9\u79f0\u5efa\u6a21\u663e\u793a\u4e86\u5e94\u529b\u5747\u5300\u6027\uff0c\u964d\u4f4e\u4e86\u65ad\u88c2\u98ce\u9669\u3002<\/li>\n\n<li><strong>\u78b3\u5316\u7845\u5d4c\u5165\u6280\u672f<\/strong>:<ul class=\"wp-block-list\"><li><strong>\u9891\u7387\u6269\u5c55<\/strong>:\u78b3\u5316\u7845\u7684\u9ad8\u5f39\u6027\u6a21\u91cf\uff08450GPa\uff09\u5c06\u5171\u632f\u9891\u7387\u4ece 26kHz \u63d0\u9ad8\u5230 70kHz\uff08\u800c\u5e73\u9762\u7845\u819c\u7684\u5171\u632f\u9891\u7387\u4e3a 63kHz\uff09\u3002<\/li>\n\n<li><strong>\u7075\u654f\u5ea6\u6743\u8861<\/strong>:\u7075\u654f\u5ea6\u4ec5\u4ece -76dB \u4e0b\u964d\u5230 -79dB\uff0c\u4f18\u4e8e\u5546\u7528\u8d85\u58f0\u6ce2\u4f20\u611f\u5668\uff08\u901a\u5e38\u4e3a -82dB\uff09\u3002<\/li><\/ul><\/li>\n\n<li><strong>\u53ef\u8c03\u6027<\/strong>:\u8c03\u6574\u5d4c\u5165\u5f0f\u6750\u6599\u9ad8\u5ea6\uff08\u6a21\u62df\u6b65\u957f\u4e3a 0.1 \u5fae\u7c73\uff09\u53ef\u5b9a\u5236\u9891\u7387-\u7075\u654f\u5ea6\u5e73\u8861\u3002<\/li><\/ol><p><strong>\u56fe 1\uff1a\u5d4c\u5165\u78b3\u5316\u7845\u7684\u6ce2\u7eb9\u7845\u819c\uff08\u793a\u4f8b\uff1aCOMSOL \u5e94\u529b\u5206\u5e03\uff09<\/strong><\/p><h4 class=\"wp-block-heading\">2.SISTC \u7684\u4f18\u52bf\u4e0e\u4ea7\u54c1\u5b9e\u65bd<\/h4><p>\u5229\u7528\u8fd9\u9879\u7814\u7a76\u3001&nbsp;<strong>SISTC<\/strong>&nbsp;\u63d0\u4f9b\u9ad8\u9891 MEMS \u9ea6\u514b\u98ce\u89e3\u51b3\u65b9\u6848\uff1a<br>\u2705&nbsp;<strong>\u5bbd\u5e26\u8986\u76d6\u8303\u56f4\uff0820Hz-70kHz\uff09<\/strong>:\u652f\u6301\u8d85\u58f0\u6ce2\u68c0\u6d4b\u548c\u9ad8\u4fdd\u771f\u5f55\u97f3\u3002<br>\u2705&nbsp;<strong>\u5de5\u4e1a\u8010\u7528\u6027<\/strong>:\u6ce2\u7eb9\u6297\u75b2\u52b3\u8bbe\u8ba1\u53ef\u901a\u8fc7 10 \u4e07\u6b21\u673a\u68b0\u632f\u52a8\u5faa\u73af\u3002<br>\u2705&nbsp;<strong>\u5b9a\u5236<\/strong>:\u4e0e\u78b3\u5316\u7845\uff08SiC\uff09\u3001\u6c2e\u5316\u94dd\uff08AlN\uff09\u548c\u5176\u4ed6\u5f02\u79cd\u6750\u6599\u517c\u5bb9\uff0c\u53ef\u5b9e\u73b0\u7279\u6b8a\u9891\u7387\u54cd\u5e94\u3002<\/p><p><strong>\u63a2\u7a76 SISTC \u7684\u9ad8\u9891 MEMS \u9ea6\u514b\u98ce \u2192 SISTC \u7684\u9ad8\u9891 MEMS \u9ea6\u514b\u98ce&nbsp;<a href=\"https:\/\/sistc.com\/zh\/product-category\/mems-microphone\/\" target=\"_blank\" rel=\"noreferrer noopener\">\u4ea7\u54c1\u8be6\u60c5<\/a><\/strong><\/p><h4 class=\"wp-block-heading\">3.\u5e94\u7528\u548c\u5e02\u573a\u6f5c\u529b<\/h4><ol start=\"1\" class=\"wp-block-list\"><li><strong>\u5de5\u4e1a\u65e0\u635f\u68c0\u6d4b<\/strong>:\u8d85\u58f0\u6ce2\u63a2\u4f24\u4eea\u7684\u88c2\u7eb9\u68c0\u6d4b\u7cbe\u5ea6\u53ef\u8fbe 0.1 \u6beb\u7c73\u3002<\/li>\n\n<li><strong>\u533b\u5b66\u5f71\u50cf<\/strong>:\u4fbf\u643a\u5f0f\u8d85\u58f0\u6ce2\u8bbe\u5907\u7684\u5206\u8fa8\u7387\u8fbe\u5230 500 \u5fae\u7c73\u3002<\/li>\n\n<li><strong>\u667a\u80fd\u5bb6\u5c45<\/strong>:\u542f\u7528\u5ba0\u7269\u8d85\u58f0\u6ce2\u6307\u4ee4\u4ea4\u4e92\uff0820-45kHz\uff09\u3002<\/li><\/ol><p>\u8d85\u58f0\u6ce2\u4f20\u611f\u5668\u5e02\u573a\u9884\u8ba1\u5c06\u8fbe\u5230&nbsp;<strong>\u5230 2027 \u5e74\u8fbe\u5230 $63 \u4ebf\u7f8e\u5143<\/strong>&nbsp;(<a href=\"https:\/\/www.marketsandmarkets.com\/ultrasonic-sensors\" target=\"_blank\" rel=\"noreferrer noopener\">MarketsandMarkets \u62a5\u544a<\/a>)\uff0c\u5e74\u590d\u5408\u589e\u957f\u7387\u4e3a 8.2%\u3002SISTC \u4e0e\u5168\u7403\u533b\u7597\u8bbe\u5907\u9886\u5148\u4f01\u4e1a\u5408\u4f5c\uff0c\u5c06\u8fd9\u9879\u6280\u672f\u5546\u4e1a\u5316\u3002<\/p><h4 class=\"wp-block-heading\">\u4e3a\u4ec0\u4e48\u9009\u62e9 SISTC\uff1f<\/h4><ul class=\"wp-block-list\"><li><strong>\u591a\u5b66\u79d1\u6a21\u62df<\/strong>:COMSOL\/ANSYS \u96c6\u6210\u53ef\u5c06\u7814\u53d1\u5468\u671f\u7f29\u77ed 50%\u3002<\/li>\n\n<li><strong>\u6676\u5706\u7ea7\u7c98\u63a5<\/strong>:\u78b3\u5316\u7845\u548c\u7845\u4e4b\u95f4\u7684\u754c\u9762\u6c14\u6ce1\u4e3a\u96f6\uff0c\u4ea7\u91cf &gt;99%\u3002<\/li>\n\n<li><strong>\u5168\u65b9\u4f4d\u8ba4\u8bc1<\/strong>:\u7b26\u5408 IEC 61000-4 EMC \u6807\u51c6\u3002<\/li><\/ul><p><strong>\u4e0b\u8f7d\u300a\u9ad8\u9891 MEMS \u767d\u76ae\u4e66\u300b\u2192&nbsp;<a href=\"https:\/\/sistc.com\/zh\/product-category\/mems-microphone\/\" target=\"_blank\" rel=\"noreferrer noopener\">SISTC \u8d44\u6e90\u4e2d\u5fc3<\/a><\/strong><\/p><p><strong>\u7ed3\u8bba<\/strong><br>\u9ad8\u9891 MEMS \u9ea6\u514b\u98ce\u6b63\u5728\u91cd\u65b0\u5b9a\u4e49\u58f0\u5b66\u4f20\u611f\u7684\u6781\u9650\u3002SISTC \u5c06\u6750\u6599\u521b\u65b0\u4e0e\u7ed3\u6784\u4f18\u5316\u76f8\u7ed3\u5408\uff0c\u63d0\u4f9b\u4ece\u6a21\u62df\u5230\u91cf\u4ea7\u7684\u7aef\u5230\u7aef\u89e3\u51b3\u65b9\u6848\u3002\u5982\u9700\u5b9a\u5236\u8bbe\u8ba1\u6216\u6837\u54c1\uff0c\u8bf7\u8054\u7cfb\u6211\u4eec\u7684\u5de5\u7a0b\u56e2\u961f\uff01<\/p><p><strong>\u6743\u5a01\u53c2\u8003\u8d44\u6599\uff1a<\/strong><\/p><ul class=\"wp-block-list\"><li><a href=\"https:\/\/www.comsol.com\/multiphysics\" target=\"_blank\" rel=\"noreferrer noopener\">COMSOL \u591a\u7269\u7406\u573a\u6307\u5357<\/a><\/li>\n\n<li><a href=\"https:\/\/www.ieee.org\/ultrasonics\" target=\"_blank\" rel=\"noreferrer noopener\">IEEE \u8d85\u58f0\u6ce2\u4f20\u611f\u5668\u6807\u51c6<\/a><\/li><\/ul><p><\/p>","protected":false},"excerpt":{"rendered":"<p>\u8d85\u8d8a 20kHz\uff1a\u9ad8\u9891 MEMS \u4f20\u58f0\u5668\u6280\u672f\u7684\u521b\u65b0 \u5de5\u4e1a\u65e0\u635f\u68c0\u6d4b\u3001\u751f\u7269\u533b\u5b66\u6210\u50cf\u548c\u6d88\u8d39\u7c7b\u7535\u5b50\u4ea7\u54c1\u5bf9\u8d85\u58f0\u6ce2\u4fe1\u53f7\u68c0\u6d4b\uff08&gt;20kHz\uff09\u7684\u9700\u6c42\u65e5\u76ca\u589e\u957f\uff0c\u8fd9\u5c31\u8981\u6c42 MEMS \u4f20\u58f0\u5668\u5728 [...] \u4e4b\u95f4\u53d6\u5f97\u5e73\u8861\u3002<\/p>","protected":false},"author":2,"featured_media":0,"comment_status":"closed","ping_status":"closed","sticky":false,"template":"","format":"standard","meta":{"_monsterinsights_skip_tracking":false,"_monsterinsights_sitenote_active":false,"_monsterinsights_sitenote_note":"","_monsterinsights_sitenote_category":0,"site-sidebar-layout":"default","site-content-layout":"","ast-site-content-layout":"default","site-content-style":"default","site-sidebar-style":"default","ast-global-header-display":"","ast-banner-title-visibility":"","ast-main-header-display":"","ast-hfb-above-header-display":"","ast-hfb-below-header-display":"","ast-hfb-mobile-header-display":"","site-post-title":"","ast-breadcrumbs-content":"","ast-featured-img":"","footer-sml-layout":"","theme-transparent-header-meta":"","adv-header-id-meta":"","stick-header-meta":"","header-above-stick-meta":"","header-main-stick-meta":"","header-below-stick-meta":"","astra-migrate-meta-layouts":"set","ast-page-background-enabled":"default","ast-page-background-meta":{"desktop":{"background-color":"","background-image":"","background-repeat":"repeat","background-position":"center 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center","background-size":"auto","background-attachment":"scroll","background-type":"","background-media":"","overlay-type":"","overlay-color":"","overlay-opacity":"","overlay-gradient":""}},"_joinchat":[],"footnotes":""},"categories":[1],"tags":[],"class_list":["post-15234","post","type-post","status-publish","format-standard","hentry","category-company-news"],"aioseo_notices":[],"yoast_head":"<!-- This site is optimized with the Yoast SEO plugin v24.0 - https:\/\/yoast.com\/wordpress\/plugins\/seo\/ -->\n<title>High-Frequency Resonance Breakthrough: How Corrugated Silicon Membranes with SiC Embedding Redefine MEMS Microphone Performance | SISTC Innovative Solutions - SILICON SOURCE<\/title>\n<meta name=\"description\" content=\"SISTC extends MEMS microphone frequency to 70kHz via SiC-embedded corrugated membranes, enabling precision ultrasonic detection. 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