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\u4e86\u89e3 MEMS \u9ea6\u514b\u98ce\u9635\u5217<\/h2>

MEMS\uff08\u5fae\u673a\u7535\u7cfb\u7edf\uff09\u9ea6\u514b\u98ce<\/strong> \u662f\u4e00\u79cd\u5fae\u578b\u7845\u57fa\u4f20\u611f\u5668\uff0c\u53ef\u5c06\u58f0\u97f3\u8f6c\u6362\u6210\u7535\u4fe1\u53f7\u3002\u5f53\u914d\u7f6e\u6210\u9635\u5217\u65f6\uff0c\u8fd9\u4e9b\u9ea6\u514b\u98ce\u53ef\u4ee5\u534f\u540c\u5de5\u4f5c\uff0c\u6355\u6349\u6765\u81ea\u4e0d\u540c\u65b9\u5411\u7684\u97f3\u9891\uff0c\u4ece\u800c\u5b9e\u73b0\u6ce2\u675f\u6210\u5f62\u7b49\u590d\u6742\u7684\u4fe1\u53f7\u5904\u7406\u6280\u672f\u3002<\/p>

\"\"<\/figure>

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\u6ce2\u675f\u6210\u5f62<\/strong> \u662f\u4e00\u79cd\u4fe1\u53f7\u5904\u7406\u6280\u672f\uff0c\u5229\u7528\u9635\u5217\u4e2d\u9ea6\u514b\u98ce\u7684\u7a7a\u95f4\u5206\u5e03\u6765\u589e\u5f3a\u7279\u5b9a\u65b9\u5411\u7684\u97f3\u9891\u6355\u83b7\u3002\u901a\u8fc7\u8c03\u6574\u6bcf\u4e2a\u9ea6\u514b\u98ce\u63a5\u6536\u4fe1\u53f7\u7684\u65f6\u95f4\u548c\u76f8\u4f4d\uff0c\u6ce2\u675f\u6210\u5f62\u7b97\u6cd5\u53ef\u4ee5\u653e\u5927\u6765\u81ea\u6240\u9700\u65b9\u5411\u7684\u58f0\u97f3\uff0c\u540c\u65f6\u51cf\u5f31\u5176\u4ed6\u6765\u6e90\u7684\u566a\u97f3\u3002<\/p>

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    MEMS \u9ea6\u514b\u98ce\u9635\u5217\u7684\u4f18\u52bf<\/h2>

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